應用中心 / 機台設備
Application Center / Equipment
應用服務Service of Application Center
  • 製程問題解決(製程優化)
  • 機台功能介紹
  • 新材料評估
  • 日本研發評估支援
  • Customer Claim Solving (optimize process)
  • Machine Demonstration
  • Evaluation for New Tape
  • R&D Center in Japan Request Evaluation
300 mm全自動研磨膠帶貼合機 RAD-3520F/12300 mm Fully-Automatic BG Tape Laminator RAD-3520F/12
  • 透過膠帶張力控制及回報方式實現低張力貼合
  • 使用多關節機械手臂進行三次元膠帶切割
  • 採用獨特的貼合機構,實現 WLCSP 高精密性無氣泡的貼合作業
  • Low-tension lamination by tape tension control unit and feedback control
  • Three dimension cutting method by multi-jointed robot arm
  • Accurate and void-less tape lamination to WLCSPs by uniquely developedlaminating mechanism
300 mm全自動晶圓背面保護膠帶貼合機 RAD-3600F/12300 mm Fully-Automatic LC Tape Laminator RAD-3600F/12
  • 透過獨自開發的貼合機構,實現高精度膠帶貼合
  • 設備內採用Precut方式,避免切割刀接觸晶圓造成損傷
  • 新選配:對應翹曲晶圓 (200 mm: 5 mm / 300 mm: 7 mm)
  • Highly precise tape lamination is achieved with the uniquely developed laminating mechanism
  • The in-line precut mechanism eliminates wafer edge damage caused by tape cutting along the wafer periphery
  • New Option : Wafer warpage compatibility (200 mm : 5 mm / 300 mm : 7 mm)
300 mm全自動切割膠帶貼合機 RAD-2510F/12Sa300 mm Fully-Automatic Multifunction Wafer Mounter RAD-2510F/12Sa
  • 以全面接觸式搬運晶圓,實現極薄晶圓穩定性搬運功能
  • 透過本公司的研磨用保護膠帶剝離方式,可穩定地從極薄晶圓上剝離研磨用保護膠帶
  • 選配:可對應無貼合背面研磨保護膠帶之晶圓(適用於WLCSP)
  • 選配:可對應7 mm翹曲晶圓(如 : 晶圓尺寸300 mm)
  • Stable wafer transfer by adopting full contact transfer of wafer with back grinding tape
  • Our unique back grinding tape peeling method accomplishes stable peeling from ultra-thin wafers
  • Option : Compatibility of wafer without back grinding tape for WLCSP wafer process
  • Option : Compatibility of 7 mm warpage wafer (ex. 300 mm wafer)
300 mm全自動膠帶轉貼機RAD-2600F/12300 mm Fully-Automatic Remounter RAD-2600F/12
  • 可於同個工作台上完成膠帶切割及轉貼步驟,使晶圓處理更加穩定
  • 在切割膠帶轉貼至另一面前,事先將已貼合膠帶裁切成晶圓尺寸,使得膠帶之間不留殘膠
  • 選配:切割膠帶 inline 預切割
  • 選配:晶圓貼合精度量測模組
  • 選配:適用於 8 吋晶圓及鐵框
  • 選配:視覺系統(晶圓 ID 讀碼及條碼貼合系統)
  • Tape cutting and remounting is performed at the same table for stable wafer handling
  • The mounted tape is cut to wafer size before dicing tape is remounted on the opposite side, so there is no adhesion between the tapes
  • Option : Dicing tape inline precut
  • Option : 8 inch wafer and ring frame compatibility
  • Option : Wafer mounting accuracy measurement unit
  • Option : Vision system (wafer ID reader & barcode attachment system)